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Systems and methods of phase diversity wavefront sensing
专利权人:
Thomas D. Raymond
发明人:
Thomas D. Raymond,Paul Pulaski,Stephen W. Farrer,Daniel R. Neal,Alan H. Greenaway,David M. Faichnie,Heather I. Campbell Dalgarno,Graham N. Craik
申请号:
US12259381
公开号:
US08118429B2
申请日:
2008.10.28
申请国别(地区):
US
年份:
2012
代理人:
摘要:
A phase diversity wavefront sensor includes an optical system including at least one optical element for receiving a light beam a diffractive optical element having a diffractive pattern defining a filter function, the diffractive optical element being arranged to produce, in conjunction with the optical system, images from the light beam associated with at least two diffraction orders and a detector for detecting the images and outputting image data corresponding to the detected images. In one embodiment, the optical system, diffractive optical element, and detector are arranged to provide telecentric, pupil plane images of the light beam. A processor receives the image data from the detector, and executes a Gerchberg-Saxton phase retrieval algorithm to measure the wavefront of the light beam.
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