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Interféromètre optique pour l'imagerie pour des profondeurs différentes d'un objet
专利权人:
KABUSHIKI KAISHA TOPCON
发明人:
申请号:
EP05006897.2
公开号:
EP1582143B1
申请日:
2005.03.30
申请国别(地区):
EP
年份:
2012
代理人:
摘要:
An optical image measuring apparatus including: a beam splitter (4) for dividing a light beam into signal light (S) and reference light (R); beam splitters for dividing the reference light (R) into plural reference light beams frequency shifters for shifting frequencies of the reference light beams by different amounts; and reflector plates arranged at different distances from an object to be measured (O). The reference light beams and the signal light (S) reflected by the object to be measured in depth regions are superimposed on each other to thereby produce interference light. CCD cameras receive the interference light component and convert the interference light component into electrical signals to output the signals. A computer forms images in depth regions corresponding to the interference light components based on the electrical signals.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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