An EUV light source device is described herein which may comprise a laser beam travelling along a beam path, at least a portion of the beam path aligned along a linear axis a material for interaction with the laser beam at an irradiation site to create an EUV light emitting plasma a first reflector having a focal point, the first reflector positioned with the focal point on the linear axis, the first reflector receiving laser light along the beam path and a second reflector receiving laser light reflected by the first reflector and directing the laser light toward the irradiation site.
