KIM, JEE HYUN,김지현,LEE, CHANG HO,이창호,HAN, SEUNG HOON,한승훈,KIM, KYUNG UN,김경운,PARK, KI BEOM,박기범
申请号：
KR1020120037458
公开号：
KR1012963690000B1
申请日:
2012.04.10
申请国别(地区):
KR
年份:
2013
代理人:
摘要：
PURPOSE: A target scanning light single layer photographing system using a visible laser beam is provided to supply by obtaining automatically a light single layer image about a target position expressed by a user.CONSTITUTION: A target scanning light single layer photographing system (10) using a visible laser beam comprises a target position display (100), a sample stand (110), a sample monitoring unit (120), a light single layer image offering unit (130), a scanner (140), a scanner moving unit (150), and a control device (160). The target position display indicates a target position on a surface of a sample. The sample monitoring unit takes a picture of the surface of the sample in which a target position is indicated. The sample monitoring unit provides a monitoring image about the sample on a real time basis. The light single layer image offering unit provides a light single layer image about the sample to the control device by using an interference signal of a reference beam and a signal beam. The scanner scans the sample by controlling a route of rays of a second light progressed from the light single layer image offering unit. The scanner provides to the light single layer image offering unit by controlling a route of a signal light formed by scanning the sample. The scanner moving unit moves the scanner according to a scanner moving signal. The control device sets up as a target location by extracting location information of a visible laser beam from a monitoring image provided from the sample monitoring unit. The control device provides to the scanner moving unit by generating the scanner moving signal.COPYRIGHT KIPO 2013[Reference numerals] (130) Light single layer image offering unit (160) Control device본 발명은 표적 스캐닝이 가능한 광단층 촬영 시스템에 관한 것이다. 상기 광단층 촬영 시스템은, 샘플의 표면에 표적 위치를 표시하는 표적 위치 표시 장치 표적 위치가 표시된 상기 샘플의 표면을 촬상하여 샘플에 대한 모니터링 영상을 제공하는 샘플 모니터링부 기준빛과 신호빛(Signal beam)의 간섭 신호를 이용하여 샘플에 대한 광단층 영상을 생성하여 제공하는 광단층 이미지 제공부 상기 광단층 이미지 제공부로부터 진행되는 제2 빛살의 경로를 제어하여 상
