The chemical liquid bottle 100 is inclined by the bottle push-up mechanism 82 and the chemical liquid is injected into the chemical liquid tank 58 from the chemical liquid supply pipe 62 by its own weight, and after the chemical liquid injection is completed, when the liquid chemical tray 81 is pulled out, the bottle push-To the initial state. Along with this, the chemical liquid bottle 100 returns to its original position in the horizontal state or the plug portion 100 a faces upward in the direction of gravity, so that the chemical liquid remaining in the chemical liquid bottle 100 is prevented from flowing out to the outside by gravity.ボトル押上機構82によって薬液ボトル100が傾斜して薬液が自重で薬液供給管路62から薬液タンク58に注入され、薬液注入が完了した後、薬液トレイ81を引き出すと、ボトル押上機構82が平面状の初期状態に復帰する。これに伴い、薬液ボトル100が水平状態或いは栓部100aが重力方向に対して上向きの元のセット位置に戻るため、薬液ボトル100内に残留した薬液が重力によって外部に流れ出ることが防止される。
