Cui Li,Cutler Charlotte A.,Coley Suzanne M.,Ongayi Owendi,Sullivan Christopher P.,LaBeaume Paul J.,Yamada Shintaro,Li Mingqi,Cameron James F.
申请号：
US201615254929
公开号：
US10007184(B2)
申请日:
2016.09.01
申请国别(地区):
美国
年份:
2018
代理人:
Cairns S. Matthew
摘要：
Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si—O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.
