UNIVERSITE DE LORRAINE;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
发明人:
Stefan McMurtry,Omar Elmazria
申请号：
US14405670
公开号：
US10351945B2
申请日:
2013.06.13
申请国别(地区):
US
年份:
2019
代理人:
摘要：
The method for obtaining a nano-capsule structure includes at least one layer of resin deposited on a layer of substrate. The capsule nanometric in size is capable of enabling the encapsulation of a compound. The layer of resin is structured, by low voltage electron lithography, or by optical lithography or by nanoimprinting in such a way as to obtain at least one cavity in the thickness of the layer of resin. The cavity has a depth smaller than the thickness of the layer of resin. At least one layer of an encapsulating material is isotropically deposited by sputtering the material under vacuum. The cavity is sealed with a sealing material. The layer of resin is dissolved by soaking in a suitable solvent.
