Aspects disclosed herein relate to forming on a substrate fastener elements suitable for use in touch fastener by employing vibration forming methods. The processes described provide for a greater flexibility in manufacturing than prior methods and overcome certain limitations in prior forming techniques. Further, the product made can embody a variety of different configurations suitable for a given application. Employing vibration forming methods, such as ultrasonic forming methods, allows for the use of a wider variety of substrate material than materials used with convention methods of touch fastener formation.