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Ga含有酸化物層成長用β−Ga2O3系単結晶基板
专利权人:
株式会社タムラ製作所
发明人:
佐々木 公平
申请号:
JP20140096526
公开号:
JP6082711(B2)
申请日:
2014.05.08
申请国别(地区):
日本
年份:
2017
代理人:
摘要:
Provided is a substrate for epitaxial growth, which enables the improvement in quality of a Ga-containing oxide layer that is formed on a ²-Ga 2 O 3 single-crystal substrate. A substrate (1) for epitaxial growth comprises ²-Ga 2 O 3 single crystals, wherein face (010) of the single crystals or a face that is inclined at an angle equal to or smaller than 37.5° with respect to the face (010) is the major face. A crystal laminate structure (2) comprises: the substrate (1) for epitaxial growth; and epitaxial crystals (20) which are formed on the major face (10) of the substrate (1) for epitaxial growth and each of which comprises a Ga-containing oxide.
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