PROBLEM TO BE SOLVED: To provide a probe, wherein deterioration of adhesion between an optical reflection layer and a support layer is prevented from occurring due to gas inflow and exfoliation and the like is reduced, by forming a gas barrier layer for compensating for a high gas transparency of a support layer in an optical reflection member.SOLUTION: A probe includes: an element having at least one cell structure in which a vibration film containing one of two electrodes provided while holding a space therebetween is vibratably supported an optical reflection layer 108 provided closer to the object than the element a support layer 104 that supports the optical reflection layer 108 and a gas barrier layer 106 that has higher gas barrier properties than the support layer, on at least one of both surfaces of the support layer 104.COPYRIGHT: (C)2014,JPO&INPIT【課題】光反射部材において支持層の高い気体透過性を補うためのガスバリア層を形成することで、気体流入による光反射層と支持層間の密着性劣化を防ぎ、剥離などを低減した探触子を提供する。【解決手段】探触子は、間隙を挟んで設けられた2つの電極のうちの一方の電極を含む振動膜が振動可能に支持されたセル構造を少なくとも1つ含む素子と、前記素子より被検体側に設けられた光反射層108と、光反射層108を支持する支持層104と、支持層104の両面の少なくとも一方の側に、支持層より高いガスバリア性を有するガスバリア層106を有する。【選択図】図1
