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Composition for plasma processing detection and indicator for plasma processing detection
专利权人:
发明人:
SAKUMURA, TAKESHI,作村武志,作村武志
申请号:
TW106122403
公开号:
TW201809213A
申请日:
2017.07.04
申请国别(地区):
TW
年份:
2018
代理人:
摘要:
To provide a composition for plasma processing detection and an indicator for plasma processing detection, which have high sensitivity. A composition for plasma processing detection, which contains one or more first dyes selected from the group consisting of azo, anthraquinone, methine and xanthene and a discoloration accelerator that accelerates discoloration of the first dyes in a plasma processing atmosphere. This composition for plasma processing detection is characterized in that: the discoloration accelerator contains one or more compounds represented by a chemical structural formula that comprises a chemical structure wherein two benzene rings are linked by a single bond or a linking group and the linking group links the two benzene rings by having two or three single bonds connected in series.提供一種靈敏度高之電漿處理檢測用組成物及電漿處理檢測用指示劑。本發明係一種電漿處理檢測用組成物,其係含有第1色素及變色促進劑;該第1色素係選自偶氮、蒽醌、次甲基、及呫噸所成群中1種以上;該變色促進劑係促進該第1色素在電漿處理環境下變色,其特徵係前述變色促進劑,係含有1種以上之化合物,該化合物係由包含2個苯環以單鍵或連接基連結之化學構造的化學構造式所表示,前述連接基,係藉由2個或3個之單鍵以直鏈連結而使2個苯環連結者。
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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