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Apparatus for detecting a 3D structure of an object
专利权人:
Voco GmbH
发明人:
Alexander Knüttel
申请号:
US14259942
公开号:
US09297647B2
申请日:
2014.04.23
申请国别(地区):
US
年份:
2016
代理人:
摘要:
An apparatus for detecting a 3D structure of an object. The apparatus has first and second laser emitters which generate laser radiation having first and second wavelengths, respectively, the first wavelength being different from the second wavelength. Optical devices are disclosed, including a beam splitter, which splits the laser radiation of the laser emitters in each case into a reference radiation and an illuminating radiation. The illuminating radiation impinges upon the object to be measured, is reflected by the object as object radiation and interferes with the reference radiation. A detector receives the interference patterns. The laser emitters are located such that the illuminating radiation of the first and second laser emitters impinge upon the object at different angles of incidence. Also discussed is a measuring device which measures the two wavelengths of the laser radiation of the laser emitters and influences the recording of the interference patterns.
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