A piezoelectric device includes a base, a vibration film, and a piezoelectric element. The base of the piezoelectric device has at least one opening. The opening is closed by the vibration film. The piezoelectric element is located on the vibration film. The vibration film includes a first layer that is has lower water permeability than silicon oxide and a second layer that is in close contact with the first layer and that has a larger toughness value than the first layer.
