PURPOSE: A sterilization device and a method thereof are provided to effectively sterilize by using a concentrated germicide after concentrating a germicide.CONSTITUTION: A sterilization device includes a supply device supplying a germicide a concentration room concentrating the germicide supplied by the supply device a sterilization room sterilizing the object by evaporating the germicide concentrated in the concentration room and a vacuum instrument to vacuumize the sterilization room. In a concentration mode performing sterilization using the concentrated germicide, the germicide supplied from the supply device in a concentration furnace is concentrated. The concentrated germicide is sent to the sterilization room and the conducted pipe after depressurizing the inside of the sterilization to the predetermined pressure by the vacuum instrument.COPYRIGHT KIPO 2013[Reference numerals] (AA) Sterilizing process (BB) Start (CC,EE,GG,II,LL,NN,PP,RR,TT) No (DD,FF,HH,JJ,MM,OO,QQ,SS,UU) Yes (KK) This section within about 10 seconds (S701) Open a valve(V5) (S702) Start depressurizing of a sterilization room and an evaporation furnace (S703) Concentration mode? (S704) Pump up a predetermined amount of germicide and put in a concentration furnace (S705,S730) Write the residual amount of a cartridge in an RF-ID, Write date and time information in case of initial use (S706) Concentrating the germicide (S707) Predetermined time passed after putting in the concentration furnace? (S708) Depressurized to a predetermined air pressure? (S709) Open a valve(V3) and a valve(V4) at a predetermined time to make a negative pressure in a metering pipe (S710) Open a valve(V1) at a predetermined time to inject the germicide into the metering pipe (S711) Open the valve(V3) and the valve(V4) to draw the air(other components than the germicide) out of the metering pipe (S712) Sterilization room and the evaporation furnace are depressurized to a predetermined air pressure? (S713) Close the valve(
