HIGH VOLTAGE MEMS, AND A PORTABLE ULTRASOUND DEVICE COMPRISING SUCH A MEMS

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专利权人:

发明人:

申请号：

EP15715487.3

公开号：

EP3116663A1

申请日:

2015.03.13

申请国别(地区):

EP

年份:

2017

代理人:

摘要：

An improved high voltage MEMS, and a portable ultrasound device comprising such a MEMS, and use of such a portable device for detecting a liquid volume. Microelectromechanical systems (MEMS) relate to a technology of very small devices. Piezoelectricity relates at one hand to accumulation of electric charge in certain solid materials in response to an applied mechanical stress.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/