A method of forming a non-stick coating on an electrically conductive component of an electrosurgical device, the method comprising: applying a non-stick coating on at least a portion of an electrically conductive component of an electrosurgical tissue sealing device using a plasma enhanced chemical vapor deposition technique； and controlling a thickness of the non-stick coating applied to inhibit tissue from sticking to the electrically conductive component during application of energy to the tissue and to permit a sensing of at least one tissue parameter generated via application of energy to the tissue.
