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SYSTEMES ET PROCEDES DE VALIDATION DE TRAITEMENT
专利权人:
AMO DEVELOPMENT LLC
发明人:
DAI, GUANG-MING,FABRIKANT, ANATOLY,CHERNYAK, DIMITRI,SHAH, JAYESH
申请号:
CA2916058
公开号:
CA2916058A1
申请日:
2014.11.07
申请国别(地区):
CA
年份:
2015
代理人:
摘要:
Treatment validation techniques include generating a modified treatment target from an original treatment target using a modification process, and comparing induced aberrations provided by the original and modified treatment targets, so as to verify the modified treatment target or the modification process. In some cases, a modification process may include a deconvolution process, a low pass filter process, a scaling process, or an adjustment process. The induced aberrations may include high order aberrations, such as spherical aberration.
来源网站:
中国工程科技知识中心
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http://www.ckcest.cn/home/

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