PROBLEM TO BE SOLVED: To reduce a necessary dehumidification amount or a necessary heating amount of carrier air sending hydrogen peroxide vapor into a decontamination target chamber.SOLUTION: The decontamination device includes a vapor generation means 8 evaporating hydrogen peroxide water Wh inside the carrier air CA to generate the hydrogen peroxide vapor Sh. The decontamination device also includes a concentration means 15 increasing concentration of the hydrogen peroxide water Wh supplied from a liquid tank 10 in a supply process of the hydrogen peroxide water Wh to the vapor generation means 8.COPYRIGHT: (C)2012,JPO&INPIT【課題】過酸化水素蒸気を除染対象室に送るキャリア空気の必要除湿量や必要加熱量を低減する。【解決手段】過酸化水素水Whをキャリア空気CA中で蒸発させて過酸化水素蒸気Shを発生させる蒸気発生手段8を備える除染装置において、液タンク10から供給する過酸化水素水Whを蒸気発生手段8への供給過程で高濃度化する濃縮手段15を設ける。【選択図】図1