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Piezoelectric devices for ultrasonic sensors
专利权人:
セイコーエプソン株式会社
发明人:
米村 貴幸,小野木 智英,小島 力
申请号:
JP2015246728
公开号:
JP6610883B2
申请日:
2015.12.17
申请国别(地区):
JP
年份:
2019
代理人:
摘要:
A piezoelectric device includes a substrate with a cavity, a vibrating plate which is provided on the substrate so as to block an opening surface of the cavity, and a piezoelectric element which is provided on a surface of the vibrating plate opposite to the cavity, including a first electrode, a piezoelectric layer, and a second electrode, in which the second electrode has a laminated structure including a Pt layer (lower layer side electrode) and an Ir layer (upper layer side electrode), in which the Pt layer is in contact with the piezoelectric layer, and in which, if it is assumed that two directions which are parallel to a surface of the substrate and mutually perpendicular are defined as an X direction and a Y direction, the Ir layer is extended to an outside of the cavity at least in the X direction on an X-Y plane view.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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