CHARGED PARTICLE BEAM DEVICE, ELECTRON BEAM GENERATION DEVICE, X-RAY SOURCE, X-RAY DEVICE, AND METHOD FOR MANUFACTURING STRUCTURE

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专利权人:

NIKON CORPORATION

发明人:

YAMADA, Atsushi,UMEMOTO, Takaaki,SUZUKI, Shohei,ENDO, Takeshi,MIURA, Satoshi

申请号：

WO2016JP80000

公开号：

WO2018066135(A1)

申请日:

2016.10.07

申请国别(地区):

世界知识产权组织国际局

年份:

2018

代理人:

摘要：

This charged particle beam device has: a partition wall section for forming a depressurized or vacuum region; an ejection source, which is disposed in the depressurized or vacuum region, and which ejects charged particles to the inside of the partition wall section; an excitation member disposed outside of the depressurized or vacuum region by having the partition wall section therebetween; and an internal magnetic pole, which is disposed inside of the depressurized or vacuum region, and which serves as a magnetic pole due to a magnetic field generated by the excitation member.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/