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PHOTOSENSITIVE RESIN COMPOSITION AND CURED FILM PREPARED THEREFROM
专利权人:
Rohm and Haas Electronic Materials Korea Ltd.
发明人:
Kwon Jin,Huh Geun,Na Jong-Ho,Yang Jong Han
申请号:
US201615769944
公开号:
US2018307141(A1)
申请日:
2016.09.23
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
Disclosed herein are a photosensitive resin composition and a cured film prepared therefrom. The photosensitive resin composition includes a siloxane polymer, a 1,2-quinonediazide compound, an epoxy compound and at least one silane compound represented by formula 1. The silane compound together with the epoxy compound in the resin composition further reduces the number of highly reactive silanol group present in the siloxane polymer. As a result, the resistance (chemical resistance) to chemicals used in a post-processing can be maximized to provide a cured film having excellent stability.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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