Deflection signal compensation for charged particle beam

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专利权人:

Raymond Hill

发明人:

Raymond Hill,Steve Ake Rosenberg,Daniel B. Downer

申请号：

US12533939

公开号：

US08101928B2

申请日:

2009.07.31

申请国别(地区):

US

年份:

2012

代理人:

摘要：

Charged particles that are in transit through a deflection system when the beam is repositioned do not received the correct deflection force and are misdirected. By independently applying signals to the multiple stages of a deflection system, the number of misdirected particles during a pixel change is reduced.

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