PROBLEM TO BE SOLVED: To provide a pMUT (Piezoelectric Micromachining Ultrasound Transducer) device suitable for two dimensional array probe capable of achieving a high sensitivity and a higher broad band.SOLUTION: The ultrasonic probe is configured so that the resonant frequency is adjustable by giving an external force to a vibrating part. When transmitting, a different external force is given to each MUT element to achieve a broad band. When receiving, the resonant frequency is shifted according to the time elapsed from the transmission to receive an echo at an effective frequency band according to the depth of the echo.COPYRIGHT: (C)2013,JPO&INPIT【課題】2次元アレイプローブに適したpMUT(Piezoelectric Micromachining Ultrasound Transducer)素子の高感度化、広帯域化を実現する。【解決手段】振動部に外力を加えて共振周波数が調整可能な構成とする。送信時には、各MUT素子に異なる外力を加えることにより広帯域化する。また受信時には、送信からの時間の経過に応じて共振周波数をシフトさせ、エコーの深さに合わせた効果的な周波数帯で受信する。【選択図】図5
