Three dimensional (3D) robotic micro electro mechanical systems (MEMS) arm and system

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专利权人:

Harold L. Stalford

发明人:

Harold L. Stalford

申请号：

US15295604

公开号：

US10059582B2

申请日:

2016.10.17

申请国别(地区):

US

年份:

2018

代理人:

摘要：

A micro assembly having a substrate and an operating plane coupled to the substrate. The operating plane is movable from an in-plane position to an out-of-plane position. One or more electric connections provide electric power from the substrate to the operating plane in the out-of-plane position. A tool is coupled to the operating plane. The tool is operable to receive electric power from the operating plane to perform work.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/