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Pattern transferring apparatus and pattern transferring method
专利权人:
Kazuyuki Kasumi
发明人:
Kazuyuki Kasumi,Hirohisa Ota,Eigo Kawakami,Takashi Nakamura,Toshinobu Tokita
申请号:
US11364694
公开号:
US08616874B2
申请日:
2006.02.27
申请国别(地区):
US
年份:
2013
代理人:
摘要:
A pattern transferring apparatus is disclosed which can prevent damage to a transferred pattern and realize fast mold release regardless of the type of resist. The pattern transferring apparatus transfers a pattern formed on a mold to an object by bringing the mold into contact with the apparatus has a deformer which causes deformation in the mold for releasing the mold from the object. The apparatus transfers a pattern formed on a mold to a photo-curing resin by bringing the mold into contact with the photo-curing resin and applying light thereto to cure the photo-curing resin. The apparatus has an optical system which applies light at an irradiation light intensity to a non-transfer area other than a transfer area where the pattern is to be transferred in the photo-curing resin, the intensity being different from an irradiation light intensity of light applied to the transfer area.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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