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SYSTÈME DE RÉALISATION DE TOMOGRAPHIE PAR COHÉRENCE OPTIQUE (TCO) BIDIMENSIONNELLE, DOUBLE TRAJET
专利权人:
Advanced Optical Technologies Ltd.;ADOM
发明人:
申请号:
EP19174755.9
公开号:
EP3567337A1
申请日:
2013.07.28
申请国别(地区):
EP
年份:
2019
代理人:
摘要:
Apparatus for optically analyzing an object (400) having a plurality of layers, without needing to use a reference mirror, the apparatus comprising: an extended broadband light source (200) configured to illuminate the object (400); a spectral imager (100); and an optical imaging system (300) configured, for a point of the object, to gather light that is reflected from the plurality of layers of the object (400) at the point into a conjugate point in the spectral imager (100), to thereby generate interference between light reflected from the plurality of layers of the object (400) at the point of the object, the spectral imager (100) being configured to analyze the interference pattern to thereby determine the thicknesses of the layers of the object (400) at the point of the object.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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