The support and the collimator are relatively rotated around the rotation shaft by the rotation driving device. The collimator has a blocking region that blocks X-rays and a transmission region that transmits X-rays. The transmission region includes vertices located on the rotation axis, and the length in the circumferential direction of the transmission region increases in proportion from the apex to the outside. The sample is irradiated with X-rays by an X-ray source through a transmission area of the collimator, and fluorescent X-rays from the sample are detected by a detector, and the sample is supported by a support portion. The composition of the sample was analyzed based on the fluorescent X-rays detected by the detector.藉由旋轉驅動裝置使支持部及準直儀在旋轉軸的周圍相對地旋轉。準直儀具有阻擋X射線的阻擋區域及使X射線透過的透過區域。透過區域包括位於旋轉軸上的頂點，透過區域的圓周方向上的長度是自頂點向外方成比例地增加。通過準直儀的透過區域藉由X射線源對試料照射X射線，且藉由檢測器而檢測來自試料的螢光X射線，所述試料是由支持部支持著。基於由檢測器所檢測出的螢光X射線進行試料的組成的分析。
