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PHOTOACOUSTIC WAVE METER
专利权人:
ADVANTEST CORPORATION
发明人:
IDA, TAIICHIRO
申请号:
EP13830910
公开号:
EP2887059A4
申请日:
2013.07.19
申请国别(地区):
EP
年份:
2016
代理人:
摘要:
A photoacoustic wave measurement device according to the present invention includes: an optical fiber 20 that outputs pulsed light P an external spacer 34 that is disposed between a pulsed-light output end 20a of the optical fiber 20 and a measurement object 2, and which is adapted to allow the pulsed light P to pass therethrough a piezoelectric element 14 that receives a photoacoustic wave W generated by the pulsed light P from the measurement object 2 and converts the photoacoustic wave W into an electric signal and a spacer 18 that is disposed between the external spacer 34 and the piezoelectric element 14, and which is adapted to allow the photoacoustic wave W to pass therethrough. The piezoelectric element 14 is farther from the measurement object 2 than the pulsed-light output end 20a. A part of the optical fiber 20 is disposed within the spacer 18.
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