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INTEGRATED ACOUSTIC TRANSDUCER WITH REDUCED PROPAGATION OF UNDESIRED ACOUSTIC WAVES
专利权人:
发明人:
申请号:
EP16206869.6
公开号:
EP3238629A1
申请日:
2016.12.23
申请国别(地区):
EP
年份:
2017
代理人:
摘要:
The acoustic device has a micromachined acoustic transducer element (15) an acoustically attenuating region (40) and an acoustic matching region (32) arranged between the acoustic transducer element (15) and the acoustically attenuating region (40). The acoustic transducer element (15) is formed in a first substrate (25) housing a cavity (19) delimiting a membrane (16). A second substrate (30) of semiconductor material integrating an electronic circuit is arranged between the acoustic transducer element (15) and the acoustically attenuating region (40). The acoustic matching region (32) has a first interface (32A) with the second substrate (30) and a second interface (32B) with the acoustically attenuating region (40). The acoustic matching region (32) has an impedance matched to the impedance of the second substrate (30) in proximity of the first interface (32A), and an impedance matched to the acoustically attenuating region (40) in proximity of the second interface (32B).
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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