光導波路素子およびその作製方法

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专利权人:

日本電信電話株式会社

发明人:

橋詰 泰彰,柴田 泰夫,佐藤 里江子,菊池 順裕,神徳 正樹

申请号：

JP20140056501

公开号：

JP6122397(B2)

申请日:

2014.03.19

申请国别(地区):

日本

年份:

2017

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide an optical waveguide device suppressing a defective element end face, and a manufacturing method of the optical waveguide device.SOLUTION: The optical waveguide device comprises: a lower clad layer 11 formed on a semiconductor substrate 10; an upper clad layer 13; a core layer 12 formed between the lower clad layer 11 and the upper clad layer 13; and a protection film 14 formed covering the optical waveguide. The protection film 14 is removed in a range of an emission end face of the optical waveguide device to a predetermined position on the optical waveguide.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/