An X-ray analysis apparatus including: a radiation source configured to irradiate an irradiation point on a sample with radiation an X-ray detector configured to detect a characteristic X-ray emitted from the sample, and output a signal including energy information about the characteristic X-ray an analyzer configured to analyze the signal a sample stage configured to allow placement of the sample thereon a shifting mechanism being capable of relatively shifting the sample on the sample stage and the radiation source and the X-ray detector with respect to each other a height measuring mechanism being capable of measuring the height of the irradiation point on the sample and a controller configured to control the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjust the distance of the sample with respect to the radiation source and the X-ray detector is used.
