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SYSTEMS AND METHODS FOR LASER PULSE ENERGY CONTROL
专利权人:
AMO Development; LLC
发明人:
Ihor BEREZHNYY,Mark K. LEE
申请号:
US15706252
公开号:
US20180078418A1
申请日:
2017.09.15
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A laser pulse energy control system which includes a laser source and a beam divider positioned to receive a calibration laser pulse produced by the laser source. The beam divider reflects a first portion of the calibration laser pulse along a first optical path toward a first plane and transmits a second portion of the calibration laser pulse along a second optical path toward a second plane. An energy meter determines an energy of the first portion of the calibration laser pulse at the first plane and a fluence profiler determines a fluence profile of the second portion of the calibration laser pulse at the second plane. The processor controls an energy of an ablation laser pulse produced by the laser source based on the fluence profile of the second portion of the calibration laser pulse and the energy of the first portion of the calibration laser pulse.
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中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/
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