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過酸化水素ガス発生装置
专利权人:
日揮ユニバーサル株式会社
发明人:
山元 幹夫,佐藤 直人
申请号:
JP2009286671
公开号:
JP5610186B2
申请日:
2009.12.17
申请国别(地区):
JP
年份:
2014
代理人:
摘要:

PROBLEM TO BE SOLVED: To provide a hydrogen peroxide gas generator keeping the concentration of hydrogen peroxide gas in a chamber at a sufficiently high value without reducing the pressure inside the camber, and a sterilization method using thereof.

SOLUTION: The hydrogen peroxide gas generator 100 generates hydrogen peroxide gas used for sterilization of a treating object in the chamber 110, and includes: a concentrating means 20 having a concentration vessel 22 to which the aqueous solution A1 of the hydrogen peroxide as a raw material is supplied and obtaining the concentrated liquid A2 of hydrogen peroxide an evaporation means 50 having an evaporation vessel 52 to which the concentrated liquid A2 is supplied and obtaining a mixed gas containing hydrogen peroxide gas and steam by evaporating the concentrated liquid A2 and a gas supplying means 60 having a gas supply path L5 communicating with the evaporation vessel 52 and the chamber 110 and a blower 62 provided to the gas supply path L5, and supplying the mixed gas to the chamber 110 together with carrier gas through the gas supply path L5.

COPYRIGHT: (C)2011,JPO&INPIT

来源网站:
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