David A. Brown,David J. Hepworth,Simon J. Forknall,Peter W. A. Brown,David M. Macrillo,Kevin Murray Austin
申请号：
US16039976
公开号：
US10535441B1
申请日:
2018.07.19
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A method of irradiating a target with a high power density irradiation beam is described. The method can use an irradiation system configured to output an irradiation beam through a vacuum window. The irradiation beam is scanned repetitively back and forth between two angular orientations of the irradiation beam as the irradiation beam strikes and traverses the vacuum window. The target is moved as the irradiation beam is scanned. The irradiation beam and the target are aligned. The scanning of the irradiations beam and the moving of the target are synchronized to each other. The scanning of the irradiation beam prevents localized overheating of the vacuum window and allows the irradiation beam to have a power density that would damage the vacuum window if the irradiation beam were not scanned.
