PROBLEM TO BE SOLVED: To efficiently manufacture dried food or the like that retains large proportions of the flavors, components and the like of ingredients.SOLUTION: A vacuum dryer 1 using both steam and microwaves includes: a drying chamber body 5 having an opening 3 for housing the subject A of drying an opening and closing door 7 for closing the opening 3 in the drying chamber body 5 a microwave irradiation device 9 for irradiating the subject A of drying with microwaves to dry the same a steam supply device 201 for supplying steam to the subject A of drying to heat the same and a pressure reducing device 301 for creating a reduced pressure atmosphere within the drying chamber body 5.COPYRIGHT: (C)2013,JPO&INPIT【課題】素材が持つ風味や成分等を多く残存させた乾燥食品等を効率良く製造する。【解決手段】本発明の蒸気・マイクロ波併用減圧乾燥機1は、被乾燥物Aを収容する開口部3を備えた乾燥室本体5と、乾燥室本体5の開口部3を閉塞する開閉扉7と、被乾燥物Aにマイクロ波を照射して乾燥させるマイクロ波照射装置9と、被乾燥物Aに蒸気を供給して加熱する蒸気供給装置201と、乾燥室本体5内を減圧雰囲気にする減圧装置301と、を具備することによって構成されている。【選択図】 図1