PROBLEM TO BE SOLVED: To provide an ultrasonic microscope with which the scanning of ultrasonic wave can be precisely performed with a simple construction.SOLUTION: An ultrasonic microscope 1 includes a scanner main body 2 in whose edge portion can contain an ultrasonic wave transmitting medium W1. A focal type ultrasonic wave oscillator 12 is arranged on the edge portion of the scanner main body 2. Through the ultrasonic wave oscillator 12, ultrasonic wave is emitted via the ultrasonic wave transmitting medium W such that the focal point is generated on a sample 18 and the reflective wave from the sample 18 is received and converted into electric signals. Scanning means is constructed to have an electrostriction actuator 13 which converts electric signals into distortion. A region on the edge side and a region of the base side of the electrostriction actuator 13 are bent in the opposite direction and the position of the ultrasonic wave oscillator 12 is moved such that the respective irradiation directions of the ultrasonic wave become parallel.COPYRIGHT: (C)2012,JPO&INPIT【課題】簡単な構成で超音波の走査を的確に行うことができる超音波顕微鏡を提供すること。【解決手段】超音波顕微鏡1は、先端部に超音波伝達媒体W1が収容可能なスキャナ本体2を備える。スキャナ本体2の先端部には焦点型超音波振動子12が配置され、その超音波振動子12により、試料18にて焦点を結ぶように超音波伝達媒体W1を介して超音波が照射されるとともに、試料18からの反射波が受信されて電気信号に変換される。走査手段は、電気信号を歪みに変換する電歪アクチュエータ13を含んで構成される。電歪アクチュエータ13における先端側の領域と基端側の領域とを逆方向に屈曲させ、その時々の超音波の照射方向が平行となるよう超音波振動子12の位置を移動させる。【選択図】図1
