The tube junction device 1 has a feed mechanism 500The feed mechanism is provided to move forward and backward along the feed direction.The first pusher member 542 to send the wafer WF to the first position PS2 set between the take out position PS1 and the standby position PS3 from which the wafer WF is taken out of the cassette WCMove back and forth along the feed direction with the first pusher memberA second pusher member 543 to send the wafer from the first position to the standby positionAndIn conjunction with the movement of the first pusher member and the second pusher memberThe feed operation of the wafer by the first pusher member can be switched to the feeding operation of the wafer by the second pusher member.チューブ接合装置１は送り出し機構５００を有し、送り出し機構は送り出し方向に沿って進退移動可能に設けられ、カセットＷＣからウェハーＷＦが取り出される取り出し位置ＰＳ１と待機位置ＰＳ３との間に設定される第１の位置ＰＳ２までウェハーＷＦを送り出す第１の押し子部材５４２と、第１の押し子部材とともに送り出し方向に沿って進退移動し、第１の位置から待機位置までウェハーを送り出す第２の押し子部材５４３と、を有し、第１の押し子部材と第２の押し子部材の進退移動に連動して、第１の押し子部材によるウェハーの送り出し動作を第２の押し子部材によるウェハーの送り出し動作に切り替え可能である。
