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ELECTRICAL TUNING OF PARAMETERS OF PIEZOELECTRIC ACTUATED TRANSDUCERS
专利权人:
发明人:
Julius Ming-Lin Tsai,Stephen Lloyd
申请号:
US14295881
公开号:
US20150358740A1
申请日:
2014.06.04
申请国别(地区):
US
年份:
2015
代理人:
摘要:
Parameters, such as, quality factor and/or resonance frequency of an acoustic transducer can be electrically tuned. The acoustic transducer can include a piezoelectric layer deposited on a silicon supporting layer, a first electrode layer deposited on the piezoelectric layer, and a second electrode layer deposited between the silicon supporting layer and piezoelectric layer. In one aspect, a resonant frequency of the piezoelectric actuated transducer is electrically tuned based on modifying a voltage across at least a portion of the first electrode layer and the second electrode layer. In another aspect, a quality factor of the piezoelectric actuated transducer is electrically tuned based on modifying a resistance across at least another portion of the first electrode layer and the second electrode layer.
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