A sterilized-liquefied gas apparatus of the invention includes: a liquefied gas reservoir； a source-gas supplier that supplies a source gas to the liquefied gas reservoir； a cooler that cools down an inside of the liquefied gas reservoir and thereby liquefies the source gas； a supply pipe that connects the source gas supplier and the liquefied gas reservoir； a sterilization filter provided in the supply pipe； a sterilizer that sterilizes, by a sterilizing gas, a sterilization region that is located further downstream than the sterilization filter； and a sterilizing-gas remover that removes the sterilizing gas after sterilization.本發明之無菌液化氣體裝置具有：液化氣體儲存槽；原料氣體供給裝置，其對前述液化氣體儲存槽供給原料氣體；冷卻裝置，其對前述液化氣體儲存槽內進行冷卻而將前述原料氣體液化；供給配管，其連接前述原料氣體供給裝置與前述液化氣體儲存槽；滅菌過濾器，其設置於前述供給配管；滅菌裝置，其藉由滅菌氣體，對位於較前述滅菌過濾器更靠下游部分之滅菌區域進行滅菌；及滅菌氣體去除裝置，其在滅菌後去除前述滅菌氣體。
