PROBLEM TO BE SOLVED: To improve accuracy in obtaining three-dimensional information of an object to be measured.SOLUTION: First and second ultrasonic vibrators 34A and 34B are arranged so as to sandwich the object to be measured between them. A ultrasonic wave is transmitted by the first ultrasonic vibrator 34A. A reflected wave reflected on the object is received and a receiving signal is stored in a storing part 76 as reflected wave information 76a of a first side. In the second ultrasonic vibrator 34B, the reflected wave is similarly received and a receiving signal is stored in the storing part 76 as reflected wave information 76b of a second side. A three-dimensional model of the object is formed from the reflected wave information of the first and second sides and relative positions of the two ultrasonic vibrators.COPYRIGHT: (C)2012,JPO&INPIT【課題】測定対象物の三次元モデルの精度を高める。【解決手段】測定対象物を挟むようにして第1および第2超音波振動子34A,34Bを配置する。第1超音波振動子34Aにより超音波を送信し、測定対象物で反射した反射波を受信して、この受信信号を第1の側の反射波情報76aとして格納部76に格納する。第2超音波振動子34Bについても同様に反射波を受信し、受信信号を第2の側の反射波情報76bとして格納部76に格納する。第1、第2の側の反射波情報と、二つの超音波振動子の相対位置から、測定対象物の三次元モデルを形成する。【選択図】図11
