PROBLEM TO BE SOLVED: To provide an imaging device which has inside a light source large in heat emission and can reduce temperature rise of an optical system.SOLUTION: An imaging device which acquires an image of an object to be inspected on the basis of interference light obtained by multiplexing return light obtained by radiating measurement light separated from light emitted by a light source to the object to be inspected and reference light separated from the light includes: a first housing that incorporates a light source and has a gas inflow port and a gas outflow port； a second housing incorporating at least a part of the optical system of the reference light； a third housing which incorporates the first housing and the second housing and has a vent port from which gas flows in and an exhaust opening from which gas flows out； a duct communicating the outflow port with the exhaust opening； and a fan for forming a gas flow so that the gas flows inside the third housing from the vent port, flows inside the first housing from the inflow port via the surrounding of the second housing and is exhausted through the exhaust opening from the inside of the first housing via the outflow port and the duct.SELECTED DRAWING: Figure 3【課題】発熱量の大きい光源を内部に有し、光学系の温度上昇を低減できる撮像装置を提供する。【解決手段】光源より射出された光より分離された測定光を被検査物に照射して得た戻り光と、光から分離された参照光とを合波して得た干渉光に基づいて被検査物の画像を取得する撮像装置であって、光源を内蔵し、気体の流入口及び流出口を有する第一の筐体と、参照光の光学系の少なくとも一部を内蔵する第二の筐体と、第一の筐体及び第二の筐体を内蔵し、気体が流入する通気口と気体が流出する排気開口とを有する第三の筐体と、流出口と排気開口とを連通させるダクトと、気体が、通気口から第三の筐体の内部に流入し、第二の筐体の周囲を経て流入口から第一の筐体の内部に流入し、第一の筐体の内部から流出口及びダクトを経て排気開口から排出されるように、気体の流れを形成するためのファンと、を備える。【選択図】図３
