Pedro P. Irazoqui,Dohyuk Ha,William J. Chappell,Simon W. M. John
申请号：
US14351385
公开号：
US09596988B2
申请日:
2012.10.12
申请国别(地区):
US
年份:
2017
代理人:
摘要：
Certain pressure sensor devices are much smaller than prior art devices, yet are at least as sensitive as the prior art devices. A capacitive pressure sensor can include a flexible substrate that permits bending of a pressure sensing region without significantly affecting operation thereof. The pressure sensor can include a flexible membrane in which an electrode is sandwiched between two layers of polymeric material. The sandwiched electrode can be extremely close to a reference electrode so as to provide for highly sensitive capacitance readings, yet the membrane can be restricted from contacting the reference electrode under high pressure conditions.
