Clean room, with the method diluted hydrogen peroxide (DHP) gas and its used

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专利权人:

Synexis LLC

发明人:

LEE, James D.,BOSMA, Douglas J.

申请号：

EP16783774

公开号：

EP3285816A4

申请日:

2016.04.20

申请国别(地区):

EP

年份:

2018

代理人:

摘要：

Improved clean room is provided, there is diluted hydrogen peroxide (DHP) gas provided for the case where sterilization. DHP gases are additionally provided, include clean room, volatile organic compounds (VOCs) and the above method with DHP gases prepare the reduced levels of clean room.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/