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Volatile imidazoles and group 2 imidazole based metal precursors
专利权人:
John Anthony Thomas Norman
发明人:
John Anthony Thomas Norman,Melanie K. Perez,Moo-Sung Kim
申请号:
US13016127
公开号:
US08703103B2
申请日:
2011.01.28
申请国别(地区):
US
年份:
2014
代理人:
摘要:
Sterically hindered imidazole ligands are described, along with their synthesis, which are capable of coordinating to Group 2 metals, such as: calcium, magnesium, strontium, in an eta-5 coordination mode which permits the formation of monomeric or dimeric volatile complexes.A compound comprising one or more polysubstituted imidazolate anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-imidazolate anion.Synthesis of the novel compounds and their use to form BST films is also contemplated.
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