Guang-ming Dai,Anatoly Fabrikant,Dimitri Chernyak,Jayesh Shah
申请号：
US15294070
公开号：
US10098785B2
申请日:
2016.10.14
申请国别(地区):
US
年份:
2018
代理人:
摘要：
Treatment validation techniques include generating a modified treatment target from an original treatment target using a modification process, and comparing induced aberrations provided by the original and modified treatment targets, so as to verify the modified treatment target or the modification process. In some cases, a modification process may include a deconvolution process, a low pass filter process, a scaling process, or an adjustment process. The induced aberrations may include high order aberrations, such as spherical aberration.
