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PLASMA INSTALLATION WITH A SEPARATELY TRANSPORTABLE VESSEL
专利权人:
Christof-Herbert Diener
发明人:
Christof-Herbert Diener
申请号:
US15184844
公开号:
US20160287735A1
申请日:
2016.06.16
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A plasma installation includes at least two separate components being a vessel for an object to be processed and a plasma unit having an electrical plasma source for igniting a plasma in the vessel. The plasma unit has no additional subassembly for other media so that the plasma unit can be constructed in a structurally particularly simple manner and readily operated. In a particularly preferred manner, the vessel comprises a vessel body of glass. The vessel body is preferably constructed in one piece and surrounds the object completely. The plasma can be ignited spaced apart from the plasma unit by means of a high-frequency generator, an induction coil and/or a magnetron of the electrical plasma source.
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