Michael P. Gies;Roger S. Jussel;Charles E. Hellums
发明人:
Michael P. Gies,Roger S. Jussel,Charles E. Hellums
申请号：
US16799054
公开号：
US20200268993A1
申请日:
2020.02.24
申请国别(地区):
US
年份:
2020
代理人:
摘要：
A vacuum monitoring and mitigation system is described. Embodiments of the vacuum monitoring and mitigation system can be implemented in a combined-use vacuum system to help mitigate high oxidizer levels that may damage vacuum pumps of the combined-use vacuum system. The vacuum monitoring and mitigation system can determine when an oxidizer level is above a predetermined threshold and introduce a mitigating gas into the combined-use vacuum system to lower the oxidizer level.
