The Board of Regents of the University of Texas System
发明人:
Peter STARR,Steven BAILEY,Mauli AGRAWAL
申请号：
US15102900
公开号：
US20160302729A1
申请日:
2014.12.10
申请国别(地区):
US
年份:
2016
代理人:
摘要：
A thin-film, diaphragm based device is disclosed which can be used to perform an array of sensing and actuating operations where a very thin profile is desired, such as in millimeter, micrometer, or nanometer tight spaces.
