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Method of manufacturing a flexible circuit electrode array
专利权人:
Robert J. Greenberg
发明人:
Robert J. Greenberg,Neil Hamilton Talbot,Jordan Matthew Neysmith,Jerry Ok,Brian V. Mech
申请号:
US11926459
公开号:
US08524311B1
申请日:
2007.10.29
申请国别(地区):
US
年份:
2013
代理人:
摘要:
Polymer materials make useful materials as electrode array bodies for neural stimulation. They are particularly useful for retinal stimulation to create artificial vision. Regardless of which polymer is used, the basic construction method is the same. A layer of polymer is laid down. A layer of metal is applied to the polymer and patterned to create electrodes and leads for those electrodes. A second layer of polymer is applied over the metal layer and patterned to leave openings for the electrodes, or openings are created later by means such as laser ablation. Hence the array and its supply cable are formed of a single body. A method for manufacturing a flexible circuit electrode array, comprises:a) depositing a metal trace layer on an insulator polymer base layerb) applying a layer of photoresist on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer andc) activating said insulator polymer base layer and depositing a top insulator polymer layer and forming one single insulating polymer layer with said base insulator polymer layer wherein the insulator polymer layers were treated at a temperature from 80-150° C. and then at a temperature from 230-350° C.
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