Niyaz Khusnatdinov;Dwayne L. LaBrake;Christopher Ellis Jones;Joseph G. Perez;Ian Matthew McMackin
发明人:
Niyaz Khusnatdinov,Christopher Ellis Jones,Joseph G. Perez,Dwayne L. LaBrake,Ian Matthew McMackin
申请号：
US13743772
公开号：
US08641958B2
申请日:
2013.01.17
申请国别(地区):
US
年份:
2014
代理人:
摘要：
Devices positioned between an energy source and an imprint lithography template may block exposure of energy to portions of polymerizable material dispensed on a substrate. Portions of the polymerizable material that are blocked from the energy may remain fluid, while the remaining polymerizable material is solidified.
